CF4, Tetrafluoromethane, R-14 Specialty Gas
Carbon Tetrafluoromethane (CF4, R-14) is a low temperature refridgerant and is also used in a variety of wafer etch processes. Tetrafluoromethane is used with oxygen to etch polysilicon, silicon dioxide, and silicon nitride. It is relatively inert under normal conditions and is a oxygen displacer. Concorde provides a high purity tetrafluoromethane gas resulting in a superior and more refined control of the etching process, this then results in better dimensional and profile control.
The presence of impurities such as halocarbons, as well as the presence of nitrogen or oxygen, can be detrimental to the control of the anisotropic etch. Under RF plasma conditions, the fluoride free radicals are typically in the form of CF3 or CF2.
Safety Requirements: The cryogenic liquid will rapidly boil to the gas at standard temperatures and pressures. The liquified gas can cause frostbite to any contaminated tissue. The main health hazard associated with release of this gas is asphyxiation by displacement of oxygen (see MSDS for further information).
99.2% CF4 Commerical Grade:
|
CF4 Commercial Grade Maximum Impurities |
|
|
Tetrafluoromethane |
99.2% |
|
Nitrogen + Oxygen |
0.7% |
|
Hexfluoroethane + Carbon Dioxide |
0.1% |
|
Mass Content of Water |
< 1 ppm |
|
Acidity |
< 0.1 ppmw |
99.99% CF4 High Purity Grade:
|
CF4 High Purity Grade Maximum Impurities
|
|
|
Tetrafluoromethane
|
> 99.99%
|
|
Oxygen
|
< 5 ppm
|
|
Nitrogen
|
< 10 ppm
|
|
Carbon Dioxide + Carbon Monoxide
|
< 2 ppm
|
|
Other Halocarbons
|
< 2 ppm
|
|
Sulfur Hexafluoride
|
< 1 ppm
|
|
Moisture
|
< 2 ppm
|
|
Acidity (as Hydrogen Fluoride)
|
< 0.1 ppmw
|
|
Cylinder Specifications |
Contents |
Pressure |
||
|
Cylinder |
Valve Outlet |
Pounds |
PSIG |
BAR |
|
40 cf. |
CGA 580 |
12 lb. |
2000 |
139 |
|
80 cf. |
CGA 580 |
25 lb. |
2000 |
139 |
|
220 cf. |
CGA580 |
70 lb. |
2000 |
139 |
99.999% CF4 Superior Purity Grade:
|
CF4 High Purity Grade Maximum Impurities
|
|
|
Tetrafluoromethane
|
> 99.999%
|
|
Oxygen + Argon
|
< 1 ppm
|
|
Nitrogen
|
< 4 ppm
|
|
Carbon Dioxide + Carbon Monoxide
|
< 1 ppm
|
|
Other Halocarbons
|
< 2 ppm
|
|
Sulfur Hexafluoride
|
< 1 ppm
|
|
Moisture
|
< 1 ppm
|
|
Acidity (as Hydrogen Fluoride)
|
< 0.1 ppmw
|
Appearance, Safety Requirements:
Compressed, colorless gas, non-flammable, non-explosive, has a moderate general toxic action in inhalation contact.
|
Physical Constants |
|
|
Chemical formula |
CF4 |
|
Molecular Weight |
80.005 |
|
Specific volume @ +70°F (+21.1°C) |
4.396 ft³/lb., 0274 m³/kg |
|
Critical pressure |
542.3. psia, 37.39 bar |
|
Critical temperature |
-50.17°F, -45.65°C |
|
Specific gravity @ 70°F, 1 atm (Air=1) |
3.04 |
|
Hazardous Class |
2.2 |
|
Label |
Nonflammable Gas |
|
General Description |
Colorless, Odorless |
Downloads
Neon, Ne
Neon is a chemical element with symbol Ne and atomic number 10. It is a noble gas. Neon is a colorless, odorless, inert monatomic gas under standard conditions, with about two-thirds the density of air.
Variety of Sizes in stock and ready for shipment:
5LB, 11LB, 18LB, 20LB, 25LB, 27.5LB, 35LB, 38LB, 45LB, 50LB, 57LB, 70LB, 90LB, 115LB and 1150LB. Custom Fill available upon request.
5KG, 10KG, 12.5KG, 40KG and 50KG. Custom Fill available upon request.
To learn more about our company, and its specialty gas products and services: click here to request a quotation, call 1-800-818-5109; or send us an e-mail at sales@concordegas.com.
Concorde Specialty Gases, Inc.
36 Eaton Road
Eatontown, NJ 07724
Toll Free: 1-800-818-5109
Tel: 732-544-9899
Fax: 732-544-9894
Concorde Provides:
SF6 Gas
C3F8 Gas (R-218)
CF4 Gas (R-14)
Neon Gas
Xenon Gas
Krypton Gas
Custom Gas Blends
International Shipping
ISO 9001:2015 Certified
Concorde Special Gases Brochure
Concorde Gas Customer Pledge:
- 100% Product Quality Warranty - Random testing by leading independent laboratories to ensure consistent product quality.
- 100% Product Replacement Guarantee - If any Concorde Gas product fails to meet or exceed our published quality standards, we will provide a full replacement, including all shipping expenses.
- Turnaround in One Business Day or Less - from order to shipment in the Continental US!
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Concorde Gas Services:
- 60 Days Free Demurrage
- Buy 4, Ship Free
- Cylinder Purchase, Rental, Trade-ins
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