Tetrafluoromethane (CF4, R-14) Gas

CF4, Tetrafluoromethane used is used with oxygen to etch polysilicon, silicon dioxide, and silicon nitride.Tetrafluoromethane (CF4) is a crucial component in high voltage circuit breakers, particularly when combined with sulfur hexafluoride (SF6) in varying ratios, typically around 10% CF4 to 90% SF6. This gas mixture offers superior electrical insulation and arc-quenching properties, essential for maintaining the integrity and safety of high voltage systems. CF4 enhances the dielectric strength of the mixture, allowing it to withstand significant electrical stresses without breaking down. This property is vital for preventing electrical discharges and ensuring the reliable operation of circuit breakers under high voltage conditions. Additionally, CF4’s thermal stability and chemical inertness contribute to the longevity and reliability of circuit breakers, reducing the need for frequent maintenance and replacement.

In cold weather climates, CF4 provides added benefits by improving the performance of the gas mixture at low temperatures. Ratios can be adjusted to around 20% CF4 to 80% SF6, or even higher, to ensure optimal performance. CF4 helps maintain high dielectric strength and prevents the liquefaction of SF6, ensuring the mixture remains gaseous and effective even in extreme cold. This capability is crucial for the reliable operation of high voltage circuit breakers in harsh environmental conditions. By using CF4 in the gas mixture, the overall environmental impact is also reduced, as it allows for a decrease in the volume of SF6 required. Overall, CF4 is indispensable in enhancing the safety, efficiency, and environmental sustainability of high voltage circuit breakers.

Tetrafluoromethane is also used in semiconductor fabrication to etch the polysilicon, silicon dioxide, and silicon nitride wafers. Concorde can provide a high purity tetrafluoromethane gas for these purposes resulting in a superior and more refined control of the etching process, as well as better dimensional and profile control.

CF4 Safety Requirements

Safety Requirements: The cryogenic CF4 liquid will rapidly boil to gas at standard temperatures and pressures. The liquefied gas can cause frostbite to any contaminated tissue. The main health hazard of releasing this gas is asphyxiation by oxygen displacement (see SDS for further information).

99.2% CF4 Commercial Grade:

 CF4 Commercial Grade Maximum Impurities

Tetrafluoromethane

99.2%

Nitrogen + Oxygen

0.7%

Hexafluoroethane + Carbon Dioxide

0.1%

Mass Content of Water

< 1 ppm

Acidity

< 0.1 ppmw

 

99.99% CF4 High Purity Grade:

 CF4 High Purity Grade Maximum Impurities
Tetrafluoromethane
> 99.99%
Oxygen
< 5 ppm
Nitrogen
< 10 ppm
Carbon Dioxide + Carbon Monoxide
< 2 ppm
Other Halocarbons
< 2 ppm
Sulfur Hexafluoride
< 1 ppm
Moisture
< 2 ppm
Acidity (as Hydrogen Fluoride)
< 0.1 ppmw

 

 Cylinder Specifications

Contents

Pressure

Cylinder

Valve Outlet

Pounds

PSIG

BAR

40 cf.

CGA 580

12 lb.

2000

139

80 cf.

CGA 580

25 lb.

2000

139

220 cf.

CGA580

70 lb.

2000

139

 

99.999% CF4 Superior Purity Grade:

CF4 High Purity Grade Maximum Impurities
Tetrafluoromethane
> 99.999%
Oxygen + Argon
< 1 ppm
Nitrogen
< 4 ppm
Carbon Dioxide + Carbon Monoxide
< 1 ppm
Other Halocarbons
< 2 ppm
Sulfur Hexafluoride
< 1 ppm
Moisture
< 1 ppm
Acidity (as Hydrogen Fluoride)
< 0.1 ppmw

 

Appearance, Safety Requirements:

A compressed, colorless gas, non-flammable, non-explosive, has a moderate general toxic action in inhalation contact.

 CF4 Physical Constants

Chemical formula

CF4

Molecular Weight

80.005

Specific volume @ +70°F (+21.1°C)

4.396 ft³/lb., 0274 m³/kg

Critical pressure

542.3. psia, 37.39 bar

Critical temperature

-50.17°F, -45.65°C

Specific gravity @ 70°F, 1 atm (Air=1)

3.04

Hazardous Class

2.2

Label

Nonflammable Gas

General Description

Colorless, Odorless

 

Downloads

CF4, Tetrafluoromethane Specifications pdf.

CF4 Tetrafluoromethane SDS pdf.

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