CF4, Tetrafluoromethane, R-14 Specialty Gas

CF4, Tetrafluoromethane used is used with oxygen to etch polysilicon, silicon dioxide, and silicon nitride.CF4, Tetrafluoromethane is used with oxygen to etch polysilicon, silicon dioxide, and silicon nitride.[/caption]CF4, Tetrafluoromethane is used with oxygen to etch polysilicon, silicon dioxide, and silicon nitride. It is relatively inert under normal conditions and is an oxygen displacer. Concorde provides a high purity tetrafluoromethane gas resulting in a superior and more refined control of the etching process, resulting in better dimensional and profile control.

The presence of impurities such as halocarbons, as well as the presence of nitrogen or oxygen, can be detrimental to the control of the anisotropic etch. Under RF plasma conditions, the fluoride-free radicals are typically in the form of CF3 or CF2.

CF4 Safety Requirements

Safety Requirements: The cryogenic liquid will rapidly boil to the gas at standard temperatures and pressures. The liquefied gas can cause frostbite to any contaminated tissue. The main health hazard of releasing this gas is asphyxiation by oxygen displacement (see SDS for further information).

99.2% CF4 Commerical Grade:

 CF4 Commercial Grade Maximum Impurities



Nitrogen + Oxygen


Hexafluoroethane + Carbon Dioxide


Mass Content of Water

< 1 ppm


< 0.1 ppmw


99.99% CF4 High Purity Grade:

 CF4 High Purity Grade Maximum Impurities
> 99.99%
< 5 ppm
< 10 ppm
Carbon Dioxide + Carbon Monoxide
< 2 ppm
Other Halocarbons
< 2 ppm
Sulfur Hexafluoride
< 1 ppm
< 2 ppm
Acidity (as Hydrogen Fluoride)
< 0.1 ppmw


 Cylinder Specifications




Valve Outlet




40 cf.

CGA 580

12 lb.



80 cf.

CGA 580

25 lb.



220 cf.


70 lb.



99.999% CF4 Superior Purity Grade:

CF4 High Purity Grade Maximum Impurities
> 99.999%
Oxygen + Argon
< 1 ppm
< 4 ppm
Carbon Dioxide + Carbon Monoxide
< 1 ppm
Other Halocarbons
< 2 ppm
Sulfur Hexafluoride
< 1 ppm
< 1 ppm
Acidity (as Hydrogen Fluoride)
< 0.1 ppmw


Appearance, Safety Requirements:

A compressed, colorless gas, non-flammable, non-explosive, has a moderate general toxic action in inhalation contact.

 CF4 Physical Constants

Chemical formula


Molecular Weight


Specific volume @ +70°F (+21.1°C)

4.396 ft³/lb., 0274 m³/kg

Critical pressure

542.3. psia, 37.39 bar

Critical temperature

-50.17°F, -45.65°C

Specific gravity @ 70°F, 1 atm (Air=1)


Hazardous Class



Nonflammable Gas

General Description

Colorless, Odorless



CF4, Tetrafluoromethane Specifications pdf.

CF4 Tetrafluoromethane SDS pdf.

In Stock and ready o ship worldwide: SF6 Gas global provider - Concorde Specialty Gases, Inc., 36 Eaton Road, Eatontown, NJ 07724 USA

Variety of Sizes in stock and ready for shipment:

5LB, 11LB, 18LB, 20LB, 25LB, 27.5LB, 35LB, 38LB, 45LB, 50LB, 57LB, 70LB, 90LB, 115LB and 1150LB. Custom Fill available upon request.

5KG, 10KG, 12.5KG, 40KG and 50KG. Custom Fill available upon request.

ConcordeTrak SF6 Gas Management System Online - Concorde Specialty Gases, Eatontown, NJ 07724

Concorde Specialty Gases
36 Eaton Road
Eatontown, NJ 07724

Tel: 732-544-9899

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